Global Laser Gas Lithography Market
The market for laser gas lithography refers to the industry encompassing specialized lithographic equipment and processes that use laser-based systems with gaseous media (e.g. excimer gas mixtures) to pattern and structure semiconductor wafers, micro-electromechanical systems (MEMS), optoelectronic and nanotechnology components. The scope includes laser sources (gas or gas-assisted), optical delivery & beam-shaping systems, gas mixing & purification systems, lithographic resist & etch/deposition chemicals & materials as well as services such as installation, maintenance and application engineering.